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Variance is a production-proven, high performance 2D variation analysis tool. It runs under .NET Core 3.1 on all supported platforms, with a consistent GUI. A headless executable is also available for automation.

Extensive documentation is available in the repository.

This has been built with Visual Studio 2019 (Windows and macOS) and JetBrains Rider 2019.x on Linux.

Internally, there is a sophisticated multi-threaded shape engine that can use internal primitives

Arbitrary tip definitions are available, allowing for tip vs side investigations :

Inner (concave) vs outer (convex) roundings are supported :

Proximity effects are available:

Keyhole insertion and removal is automatic:

You are not limited to internal primitives, though. GDS and Oasis layouts can be freely used : and even contoured: with overlap merging

GDS and Oasis files with DOE cells are also supported, such as those from Quilt or iDRM.

Multi-level noise can be applied :

Lens distortion can also be specified :

The contour for any layer in the tool can be output to GDSII or Oasis :

Complex inter-layer Booleans can be used to generate contours for the simulation, with automatic keyhole reconstruction:

For the variation analysis, complex set-ups can be analyzed with Boolean equations :

Custom variations can be applied on a per-input basis in the layers :

Keyholes are automatically ignored for the computations :

Reverse calculations are supported to provide appropriate input ranges for a given range of result(s) :

Simulations can be output to CSV files, as well as to SVG, GDSII or Oasis files for offline review analysis.

Simulations can also be replayed in-tool to investigate fail cases :